Clean room standard clean room dust-free workshop grade division

The clean room (clean room) is divided into many levels depending on the degree of cleanliness.

At present, the clean room grades of various semiconductor processing and panel assembly factories are mostly 1000 and 100. The smaller the number, the higher the cleanliness level.

The concept of the clean room (clean room) 1000 class is: no more than 1000 dust particles per cubic foot or more;

The concept of Class 100 of clean room (clean room) is: no more than 100 dust particles per cubic foot or more;

Note: the particle size controlled by each level is also different;

According to the standard issued by the US federal government [Federal Atandard (FS) 209E, 1992], the clean room (clean room) can be divided into six levels. They are Level 1, 10, 100, 1000, 10000, and 100000;

If the level of the clean room (clean room) is described by only the number of dust particles, it can be assumed that the size of the dust particles is not 0.5 um, and the clean room level should be expressed in a series of specific dust particle sizes. For example: level 10 is 0.2um (dust size is 0.2um or more, density is not more than 75/cubic feet), level 1 is 0.1um (dust size is 0.1um or more, density is not more than 35) Pieces per cubic foot). The clean room required for integrated circuit manufacturing must have a cleanliness level better than 1000.

First, the federal specifications clean room level

Today, the federal specifications set by the United States are generally pursued, and the BCR refers to the NASA specification for the biological particle limit. The Fed.std cleanliness is expressed by how many microparticles of 0.5 μm or more are contained in 1 ft 3 of air, and is called [grade ○ ○]. For example, when there are 10 or less in the air, it is expressed as "level 10". Second, the natural atmosphere usually contains 300,000 to 30,000,000 particles. Under the JIS standard, clean room cleanliness is divided into 8 levels. General cleanliness refers to the cleanliness level of air, which is divided into levels 1, 2, 8, and 8. In the air of 1 m ^ 3 , the dust having a particle diameter of 0.1 μm is 1 when it is 10 or less; the 100 or less is 100 = 102 is the grade 2; the thousand or less is 1000 = 103 grade 3, and so on.

Second, clean room - clean room (clean room) standard grade

US Federal Standard 209E (1992) PC/ft3

Cleanliness level: particle size (um)