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1. Clean room: The room where the concentration of airborne particles and the concentration of bacteria are controlled to meet certain requirements or standards.
2. Air cleanliness: The degree of the amount of suspended particles contained in the air in a clean environment. The dust concentration is high and low.
3. Clean room air concentration level:
1 Empty state: The facility has been completed, all power is connected and running, but there is no production equipment, materials and personnel.
2 Static: The facility has been completed, the production equipment has been installed, and it is operated under the unified state of the owner and supplier, but no personnel.
3 Dynamics: The facility operates according to the specified conditions, and the required personnel are present and operate under the agreed conditions.
4. Classification of pollutants:
1 Solid, liquid particles suspended in the air.
2 mold, pathogenic bacteria and other microorganisms suspended in the air 3 various gases harmful to the human body or the production process.
5, particle classification:
1 formation mode: dispersibility, cohesion.
2 Source: inorganic, organic, and living.
3 size: visible, microscopic, ultra-microscopic.
4 General: dust, smoke, fog, smoke.
6. Representation method of atmospheric dust concentration:
1 count concentration: expressed in terms of the number of particles contained in air per unit volume.
2 mass concentration: expressed in terms of the mass of particles contained in air per unit volume.
3 Settlement concentration: expressed as the number or mass of particles naturally settled per unit area.
7, clean room classification:
1 According to the purpose: industrial clean room (indoor positive pressure, with no living particles as the control object, the main parameters temperature, humidity, wind speed, flow field, cleanliness); biological clean room (generally positive pressure, biosafety negative pressure).
2 according to the airflow pattern: one-way flow (single flow, uniform speed, no eddy current); non-unidirectional flow (ie turbulent flow, variable direction, uneven speed, accompanied by eddy current); mixed flow (non-unidirectional flow + Unidirectional flow); spoke (missing) flow (airflow through the longitudinal section, uneven flow of the tuyere).
8, clean room standards:
1 International Cleanroom Standard: ISO14664-1Cn=10^N*(0.1/D)^2.08
Cn-maximum allowable concentration of airborne particles (pc/m?)
N-grading ordinal number (1-9), the intermediate number between integers can be specified, the minimum allowable increment is 0.1
D-particle size considered (um)
2 US Federal FS-209E Standard: ΝM=10^M(0.5∕d)^2.2
M - The value of the cleanliness level in the International System of Units. M1-M7, 13 levels, 0.5 per level
D- considered radius (um)
ΝM- is greater than or equal to the upper limit concentration of particles of particle size (d) (pc∕m?)
3 China Cleanroom Standard: "Code for Design of Clean Plants" GB50073-2001
9. Cleanroom control of noise requirements:
The Code for Cleanroom Design (GB50073-2001) specifies the noise levels as follows:
1 When testing dynamically, the noise level in the clean room should not exceed 70dB (A).
2 In the air state test, the non-unidirectional flow clean room should not be greater than 60dB (A); the unidirectional flow, mixed flow clean room should not be greater than 65dB (A).
10. Filtration efficiency: The percentage of the difference between the airborne dust concentration before and after the filter and the airborne dust concentration before the filter under the rated air volume. η=(1-C2/C1)*100% series: 1-(1-η1)(1-η2)
11. Penetration rate: the percentage of the ratio of the dust concentration of the filtered air to the dust concentration of the air before filtration is 1-η.
12. Filter face speed: The airflow speed passing through the section of the filter reflects the performance of the filter passing capacity and installation area.
Filtration speed: The velocity of the airflow passing through the area of the filter material, reflecting the ability of the filter material to pass (filtering performance).
13. Filter resistance: resistance of filter material + resistance of filter structure.
Initial resistance: The resistance of the newly produced filter to air flow under the rated air volume.
Final resistance: the resistance value of the filter scrapped (2-4 times the initial resistance).
Design resistance: representative resistance at design (average resistance at initial resistance)
14. Filter capacity: The maximum allowable dust accumulation of the filter is the mass of the filter (specifically 2 times the initial resistance) of the filter under certain test conditions.
15, air filter classification: (by filtration efficiency)
1 coarse, greater than 5um, based on 5um.
2 medium efficiency, 1-10um, subject to 1um.
3 high school efficiency, 1-5um, subject to 1um.
4 sub-efficient, less than 1um, subject to 0.5um.
5 high efficiency, 0.1-0.3um, based on 0.12um.
16. Test method for air filter test:
1 mass method: (coarse medium) filter is installed in the standard test wind tunnel, the wind is continuously dusted at the windward end, and the dust quality passing through the filter is measured at intervals to obtain the filtration efficiency of the dust quality calculation of the filter at this stage.
2 colorimetry: (middle) sampling before and after the filter, dusty air through the filter paper, the contaminated filter paper is placed under the light source, and then the light transmittance of the filter paper before and after the filter is measured by the photoelectric pen colorimeter; Under the conditions of the same composition, size and distribution, the filtration efficiency is calculated by using the relationship between the optical density and the amount of dust accumulated.
3 particle counting method: (high) the dusty airflow passes through the strong light illumination area at a small flow rate, and when the dust particles in the measured air pass sequentially, each dust particle will generate a light scattering to form an optical pulse signal. According to the relationship between the amplitude of the optical pulse signal and the size of the particle surface, the particle beam and brightness are measured by a photomultiplier tube to determine the filtration efficiency.
4DOP: (dioctyl phthalate) (high) The test dust source is 0.3um monodisperse DOP droplets heated to steam, condensed into tiny droplets under certain conditions, after removing too large and too small droplets Leaving about 0.3um of particles, the misty DOP enters the air duct, and then measures the turbidity of the gas sample before and after the filter, thereby judging the filter efficiency of the filter for 0.3um dust.
5 counting scanning method: (high) measuring instrument is a large flow laser particle counter or condensation tube counter. The counter is used to scan the entire outlet surface of the filter, and the counter gives the number and particle size of each point of dust.
6 oil mist method: (high) dust source is oil mist, the amount is turbidity in the air containing oil mist, the instrument is a turbidity meter, and the filter efficiency of the oil mist particles is determined by the difference of the turbidity of the gas sample.
7 sodium flame method: (high) brine splashes under the agitation of compressed air, dried to form tiny smoke and enter the air duct. Sampling separately before and after the filter, the salt-containing gas sample turns the color of the hydrogen flame blue and the brightness increases. The flame brightness (flame photometer) is used to determine the salt spray concentration of the air and determine the filter efficiency.
17, filter life: T = P / (N1 * 10 ^ -3 * Q * t * η) η - weight efficiency 5%
P-dust holding capacity gN1 - dust concentration of pre-air mg/m?Q-air volume m?/ht-day working time h
18. Filter air supply port: A filter component composed of a high-efficiency filter and an air supply port.
19. Fan filter unit: formed by the filter air supply port and the fan connected together.
20, clean workbench: set in the clean room or outdoor, according to the requirements of the use of the environment to maintain a highly clean local purification equipment.
Principle: Fresh air or return air is sucked through the pre-filter and pressurized by the fan, and the clean air filtered by the high-efficiency air filter is sent to the operation area.
classification:
1 According to airflow organization: non-unidirectional flow, one-way flow.
2 according to the exhaust: full cycle, DC, front exhaust, full exhaust.
3 according to process requirements: special workbench, general workbench.
21. Self-cleaning device: an air purifying device consisting of a fan-efficient, medium-efficiency, high-efficiency (sub-efficient) air filter and air supply and return air ports.
22. Clean laminar flow hood: a partial clean air supply device with vertical unidirectional flow.
23. Air shower room: A device for personal purification and prevention of polluted air entering the clean area, using high-speed clean air to remove dust particles from the surface of personal clothing or materials that have entered the clean area.
24. Transfer window: An opening device for transferring objects between clean indoors and outdoors or clean rooms, which can temporarily block the clean airflow and prevent the spread of pollutants. (mechanical, gas valve, sterilized, closed)
25, residual pressure valve: In order to maintain a certain indoor static pressure, the residual pressure valve adjusts the opening degree according to the static pressure difference, and balances the wind pressure with the position of the weight.
26, clean air conditioning unit: process air conditioning, by high-efficiency filter, wind pressure is larger than the general air conditioning unit. (Cabinet-type air conditioning unit, combined air conditioning unit, purifying new air unit)
27. One-way flow clean room:
Definition: A uniform cross-sectional velocity of a gas stream that passes through a clean room in a single direction along a parallel flow line in a single direction. According to the principle, the polluted air in the room is discharged to the outside along the entire section to purify the indoor air.

Full cloth ratio: (filter fullness) High efficiency air filter net cross-sectional area / clean room layout filter cross-sectional area.
Characteristic indicators:
1 streamline parallelism. The parallel action of the streamline is to ensure that the dust particles emitted by the dust source do not propagate in the vertical direction.
2 chaotic fluidity (speed unevenness). Describe the concentration or dispersion of the velocity field for comparison of different velocity fields, less than 0.2.
3 lower limit wind speed. The minimum wind speed that controls the polluted airflow.
Classified by airflow organization:
1. Vertical unidirectional flow: It has strong self-cleaning ability and can reach the highest cleanliness level. The clean indoor process equipment can be arranged arbitrarily, which can simplify the personal purification facilities, the roof structure is complex, and the cost of maintenance is high.
2, horizontal one-way flow: low cost, along the direction of the airflow, the flow line is slightly inclined, the dust concentration is gradually increased, the cleanliness level is gradually reduced, and the process requires a variety of cleanliness requirements.
28. Non-unidirectional flow clean room:
Definition: A clean room in which airflow flows non-parallel at uneven speeds, accompanied by backflow or eddy currents.
Principle: The indoor air is continuously diluted by the air supply air, and the indoor pollution is gradually discharged to reach equilibrium.
Characteristic indicators:
1 Number of air changes: Ensure that there is enough clean air for dilution.
2 Airflow organization: ensure uniform air supply and return air, and fully exert the dilution effect of clean airflow.
3 Self-cleaning time: Reflects the ability of the clean room to return from a pollution state to a normal state (not more than 30 minutes).

Send back to the wind: top delivery, side down.
29. Radiant clean room:
It belongs to non-unidirectional flow and is close to one-way flow. It is simpler in construction than one-way flow. The airflow is organized in a fan shape, a hemispherical shape, a semi-cylindrical shape, an upper air supply, and a contralateral return air.
30, clean room pressure difference:
Definition: The static pressure difference that must be maintained between the clean room and the surrounding space.
Purpose: To ensure that the clean room is not contaminated or polluted by the adjacent room when the clean room is temporarily damaged or the air balance is temporarily damaged.
Control method: return air outlet control, residual pressure valve control, adjustment of return air or exhaust valve, differential pressure transmission control, adjustment of fresh air valve.
31, leakage air volume calculation:
1 room ventilation times method: when the pressure difference of the clean room is 5pa, the pressure difference air volume corresponds to the number of air exchanges 1-2 times / h; 10pa, 2-4 times.
2 gap method: more reasonable and precise, the process is complicated.
32. Clean air conditioning system:
Classification: 1 centralized: single fan system and dual fan system; fans in series and parallel.
2 Decentralized: Design a partial purification device in a centralized air conditioning system; supply air in a distributed cabinet air conditioner.
Features:
1 The amount of wind is large.
2 The cooling load is large and the load factor is special.
3 fan wind pressure is high.
4 pressure difference control is strict.
5 secondary return air.
33. Clean room air supply selection:
1. To ensure the air supply level of the air cleanliness level.
2. The air supply volume determined according to the calculation of hot and cold load.
3. The amount of fresh air supplied to the clean room.
34. Fresh air volume selection in clean room:
1. New air volume required to meet health standards:
1 For the general situation where there is no obvious harmful gas in the room, the fresh air supplied to the clean room is not less than 40m?/(h* person).
2 There are harmful gases in the room, and the harmful gas in the dilution chamber is calculated according to the allowable concentration of harmful gases in the room to reach the fresh air volume.
2. Compensate for the amount of air exhausted in the room and the amount of fresh air required to maintain the positive pressure value in the room. Compare the new air volume calculated above, and take the larger one to meet the new standard of air quality.
35, personnel purification requirements:
1. At the entrance of the personnel cleaning room, net shoes should be provided.
2, save the outerwear and cleaner work clothes should be set separately.
3, the outer clothes storage wardrobe should be set up according to the design number of each person, clean work clothes should be concentrated in the clean cabinet with air blowing.
4. Washing and drying measures should be provided in the bathroom.
5. The air shower room should be located at the entrance of the clean area personnel and should be adjacent to the clean work clothes locker room.
6. When it is a vertical one-way flow clean room of level 5 or above, the air valve room should be provided.
7. It is not advisable to have a toilet in the clean area. The toilet in the indoor room for personnel cleaning should be set up.